ד"ר מאיר דנינו מבוא למערכות MEMS 83-645

Fundamentals of microfabrication Fundamentals of microfabrication
by Madou, Marc
Publisher: Cambridge University Press
621.38152 MAD f2
Microsystem design  Microsystem design
by Senturia, Stephen D
Publisher: Kluwer Academic Publishers
621.381 SEN m
Semiconductor Sensors Semiconductor Sensors
edited by S.M. Sze
Publisher: Wiley-Interscience
681.2 SEM 1994
Micromachined transducers sourcebook Micromachined transducers sourcebook
by Kovacs, Gregory T.A
Publisher: McGraw-Hill Education
681.2 KOV m